Bakeout equipment
Beside the pumping system, the bakeout equipment is an essential component in all UHV systems. Depending on the bakeout concept, it consists of a bake out controller and several fan heaters or heating wires. Bestec provides all these bake out equipments as part of a Bestec system (deposition or optics) or as separate components.
Typical design parameters
- Bakeout controllers with temperature regulation for two to eight heating channels available.
- Maximal temperature of 200°C.
- Maximal heating ramp of max. 2K/min.
- Full software control possible via integrated serial communication port.
Options
- Integration of pressure interlock possible.
- Integration of additional 24V output signal for powering small externally controlled devices possible.
- Integration of over temperature protection possible (at fan heating units).
